Method for manufacturing non-volatile memory devices

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

Reexamination Certificate

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C438S263000, C438S296000

Reexamination Certificate

active

06884680

ABSTRACT:
A manufacturing method for a non-volatile memory device includes the steps of forming a well and a channel in a silicon substrate, depositing a tunnel oxide layer, a first polysilicon layer and a nitride layer sequentially, and then performing a trench etching thereof to thereby form a self-align flash memory device.

REFERENCES:
patent: 6825523 (2004-11-01), Caprara et al.

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