Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate
2005-04-26
2005-04-26
Dang, Phuc T. (Department: 2818)
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
Having insulated gate
C438S263000, C438S296000
Reexamination Certificate
active
06884680
ABSTRACT:
A manufacturing method for a non-volatile memory device includes the steps of forming a well and a channel in a silicon substrate, depositing a tunnel oxide layer, a first polysilicon layer and a nitride layer sequentially, and then performing a trench etching thereof to thereby form a self-align flash memory device.
REFERENCES:
patent: 6825523 (2004-11-01), Caprara et al.
ANAM Semiconductor Inc.
Dang Phuc T.
Finnegan Henderson Farabow Garrett & Dunner L.L.P.
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