Method for manufacturing micro-optical mirror arrays

Details Method for manufacturing micro-optical mirror arrays Method for manufacturing micro-optical mirror arrays

2006-03-14

2006-03-14

McPherson, John A. (Department: 1756)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making named article

C430S322000, C430S323000, C430S324000, C430S330000

Reexamination Certificate

active

07011933

ABSTRACT:
A method for producing a spheroidal shaped micro-array assembly including providing a substrate having frontside patterned openings formed in the substrate; blanket depositing a photosensitive layer over the substrate including the frontside patterned openings; exposing the photosensitive layer to ionizing radiation for a predetermined period of time to produce outgassing to separate the photosensitive layer and substrate to produce a spheroidal shaped photosensitive layer portion; blanket depositing a mirror layer over the photoresist layer to preserve the spheroidal shaped photosensitive layer portion; and removing the photosensitive layer.

REFERENCES:
patent: 5245454 (1993-09-01), Blonder
patent: 6335150 (2002-01-01), Tsai
patent: 2002-350841 (2002-12-01), None

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