Method for manufacturing isolation layer having barrier...

Details Method for manufacturing isolation layer having barrier... Method for manufacturing isolation layer having barrier...

2006-12-12

2010-02-02

Landau, Matthew C (Department: 2813)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C438S435000, C438S586000, C438S770000, C257SE21546, C257SE21550

Reexamination Certificate

active

07655524

ABSTRACT:
Embodiments relate to a semiconductor device and a method for manufacturing a semiconductor device. In embodiments, a transistor including the gate electrode and a source/drain may be formed between isolation layers and a contact may be connected to the source/drain. A barrier layer may be formed at a boundary between the isolation layer and the source/drain and may physically isolate the isolation layer from the source/drain.

REFERENCES:
patent: 6323104 (2001-11-01), Trivedi
patent: 6333232 (2001-12-01), Kunikiyo
patent: 6350655 (2002-02-01), Mizuo
patent: 6355966 (2002-03-01), Trivedi
patent: 6440817 (2002-08-01), Trivedi
patent: 6730582 (2004-05-01), Wu et al.
patent: 6797579 (2004-09-01), Yoo et al.
patent: 6955955 (2005-10-01), Chen et al.
patent: 7288447 (2007-10-01), Chen et al.
patent: 7553741 (2009-06-01), Ipposhi
patent: 2001/0026980 (2001-10-01), Mizuo
patent: 2004/0029352 (2004-02-01), Beyer et al.
patent: 2004/0082141 (2004-04-01), Mizukoshi
patent: 2004/0135199 (2004-07-01), Seo
patent: 2005/0064721 (2005-03-01), Tsai et al.
patent: 2005/0136619 (2005-06-01), Seo
patent: 2006/0261436 (2006-11-01), Turner et al.
patent: 100200731 (1999-03-01), None
patent: 10-2003-0082785 (2003-10-01), None
patent: 10-2005-0069585 (2005-07-01), None
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