Etching a substrate: processes – Etching of semiconductor material to produce an article...
Reexamination Certificate
2006-05-12
2008-07-08
Tran, Binh X. (Department: 1792)
Etching a substrate: processes
Etching of semiconductor material to produce an article...
C216S008000, C216S074000, C216S096000, C977S742000
Reexamination Certificate
active
07396477
ABSTRACT:
An exemplary method for manufacturing a thermal interface material includes the steps of: providing a first substrate having a first surface and an opposite second substrate having an opposite second surface spaced apart a predetermined distance; forming a number of carbon nanotubes from one of the first the second surfaces; forming a composite material by filling interstices between the carbon nanotubes with a liquid state base material; curing the liquid state base material filled in the interstices between the carbon nanotubes; and removing the first and the second substrates from the composite material.
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Hon Hai Precision Industry Co. Ltd.
Tran Binh X.
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