Method for manufacturing a semiconductor device with a...

Details Method for manufacturing a semiconductor device with a... Method for manufacturing a semiconductor device with a...

2005-07-26

2005-07-26

Coleman, W. David (Department: 2823)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C438S700000

Reexamination Certificate

active

06921699

ABSTRACT:
A process for manufacturing a semiconductor device of the trench variety with reduced feature sizes and improved characteristics which process includes forming a termination structure having a field oxide disposed in a recess below the surface of the semiconductor die in which the active elements of the device are formed, and forming source regions after the major thermal steps have been performed.

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