Etching a substrate: processes – Etching of semiconductor material to produce an article...
Patent
1995-06-22
1996-08-13
Powell, William
Etching a substrate: processes
Etching of semiconductor material to produce an article...
216 33, 216 52, 216 56, C23F 100, B04C 122
Patent
active
055447716
ABSTRACT:
A method for manufacturing a collimator comprising the steps of patterning a plurality of thin metal strips into a plurality of basic plates, and forming grooves or ridges on front and back surfaces of each basic plates. Thereafter, the thin strips are folded, mated, and welded together to form pillar cells within the collimator.
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Choi Gil-heyun
Lee Jueng-gil
Park Sun-hoo
Powell William
Samsung Electronics Co,. Ltd.
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