Method for making an aligned carbon nanotube

Details Method for making an aligned carbon nanotube Method for making an aligned carbon nanotube

2008-09-15

2011-12-20

Meeks, Timothy (Department: 1715)

Coating processes

Direct application of electrical, magnetic, wave, or...

Plasma

C977S843000, C216S037000

Reexamination Certificate

active

08080289

ABSTRACT:
A method for making an aligned carbon nanotube includes the steps of a) applying a layer of a ferrosilicon alloy film onto a substrate, b) etching the layer of the ferrosilicon film to form a plurality of fine ferrosilicon alloy particles that are distributed properly on the substrate, and c) placing the substrate of step (b) into a microwave plasma enhanced chemical vapor deposition system, and supplying a mixture of a carbon-containing reaction gas and a balance gas at a predetermined flow ratio so as to grow carbon nanotubes on the fine ferrosilicon alloy particles, wherein said ferrosilicon alloy of step (a) comprises silicon ranging from 15 wt % to 25 wt %; and step (c) is conducted at a temperature ranging from 300 to 380° C.

REFERENCES:
patent: 6350488 (2002-02-01), Lee et al.
patent: 2002/0160111 (2002-10-01), Sun et al.
patent: 2003/0059968 (2003-03-01), Cheng et al.
patent: 2004/0099438 (2004-05-01), Arthur et al.

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