Method for making a microelectromechanical system using a...

Details Method for making a microelectromechanical system using a... Method for making a microelectromechanical system using a...

2006-06-06

2006-06-06

Smith, Bradley K. (Department: 2891)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Physical stress responsive

C438S050000, C438S048000, C257S417000, C257S418000, C257S419000

Reexamination Certificate

active

07056759

ABSTRACT:
A microelectromechanical system is made by establishing a flexure protection layer over a portion of at least one flexure which is located on a substrate. The flexure protection layer is deposited such that a portion of the flexure is left exposed. Contact is established between a flexure-engaging element and the exposed portion of the flexure. The remaining flexure protection layer is removed after the flexure-engaging element is patterned and etched.

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