Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Charge transfer device
Patent
1999-03-29
2000-03-14
Chaudhari, Chandra
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
Charge transfer device
438175, H01L 21339
Patent
active
060371943
ABSTRACT:
A memory cell having a grooved gate formed in a sub-lithographic groove, and methods of making thereof are disclosed. The groove extends the channel length to include the groove sidewalls and width of the groove. Sidewall sections of the channel located along the gate sidewalls have a larger length than the bottom channel section length located along the gate bottom width. Thus, the memory device is primarily controlled by the sidewall channel sections, instead of the bottom channel section. The groove may be a stepped groove formed by a two step etch to further increase the channel length and may be formed centered along the gate conductor width.
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Bronner Gary B.
Furukawa Toshiharu
Hakey Mark C.
Holmes Steven J.
Horak David V.
Chaudhari Chandra
International Business Machines Coirporation
Shkurko, Esq Eugene I.
Thompson Craig
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