Method for making a capacitor

Details Method for making a capacitor Method for making a capacitor

1996-05-09

1998-12-22

Tsai, Jey

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

438250, 438253, H01L 218242

Patent

active

058518703

ABSTRACT:
A novel capacitor design for use in semiconductor integrated circuits is disclosed. The capacitor includes a metal-dielectric-metal stack formed within a window and upon a conductive substrate. Contact to the top plate of the capacitor is through a window within a window, while contact to the bottom plate is achieved by a guard ring which contacts the conductive substrate.

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Multiple layer ceramic plate with embedded conductive layers Hitachi KK 19.06.81--JP-093877; V01 (V04).

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