Method for irradiating a specimen by corpuscular-beam radiation

Details Method for irradiating a specimen by corpuscular-beam radiation Method for irradiating a specimen by corpuscular-beam radiation

1976-10-15

1979-01-23

Anderson, Bruce C.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

250398, H01J 3700

Patent

active

041362853

ABSTRACT:
A method for irradiating a specimen by corpuscular-beam radiation in which an irradiated surface pattern including isolated areas unexposed to the corpuscular beam surrounded at least almost completely by areas exposed to the beam is generated on a specimen by first imaging a mask which is supported by a support grid comprising a plurality of parallel strips and having a pattern corresponding to the surface pattern to be generated, on the specimen by shadow projection by means of a corpuscular beam consisting of a plurality of parallel rays. The image of the supporting grid is then removed by tilting the corpuscular beam in a direction perpendicular to the longitudinal axis of the strips forming the support grid through an angle which is at least equal in radians to the ratio of the width of the strips to the distance between the mask and the specimen.

REFERENCES:
patent: 3770934 (1973-11-01), Randmer
patent: 3914608 (1975-10-01), Malmberg
patent: 3924136 (1975-12-01), Heynick et al.
patent: 4021674 (1977-05-01), Koops

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