4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Andreas Oelmann

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Charged-particle beam optical apparatus for imaging a mask on a

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Charged-particle beam optical apparatus for the reduction imagin

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Method for irradiating a specimen by corpuscular-beam radiation

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Method of grounding a photoblank to a holding device

Photocopying – Projection printing and copying cameras – Detailed holder for original
Reexamination Certificate

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Profile ID: LFUS-PAI-P-452432

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