Method for generating pattern, method for manufacturing...

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified configuration

Reexamination Certificate

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C257SE23145, C257S758000, C257S773000, C257S776000, C438S129000, C438S622000

Reexamination Certificate

active

07667332

ABSTRACT:
A method for generating a pattern includes reading out an interconnect layout and a hole layout, the interconnect layout prescribing interconnect patterns, the hole layout prescribing hole patterns configured to connect to the interconnect patterns; extracting one of the hole patterns to be connected within the same interconnect layer level to one of the interconnect patterns in a pattern processing area; extracting a first processing area including the extracted hole pattern; calculating a first pattern density of the interconnect patterns included in the first processing area; and generating first additional patterns in the first processing area based on the first pattern density.

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M. Okazaki, et al., “Sea of Kelvin Multiple-pattern arrangement interconnect characterization for Low-k/Cu dual damascene and its findings”, IITC 2004, Proceedings, pp. 211-213.
Notification of Reasons for Refusal mailed by the Japanese Patent Office on Jul. 14, 2009, for Japanese Application No. P2005-321571.

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