Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Reexamination Certificate
2003-10-03
2011-10-11
Meeks, Timothy (Department: 1715)
Coating processes
Direct application of electrical, magnetic, wave, or...
Plasma
C118S7230AN, C118S7230IR
Reexamination Certificate
active
08034418
ABSTRACT:
A plurality of antenna elements, each of which has first and second linear conductors whose first ends are electrically interconnected are formed. The antenna elements are arranged in plane in such a way that the first and second linear conductors are alternated and separated from one another at regular intervals, thereby forming one or more array antennas which are disposed in a chamber. The second ends of the first linear conductors are connected to a high-frequency power supply, and the second ends of the second linear conductors are connected to ground. A plurality of substrates are parallel placed on both sides of the array antennas at distances approximate to the distances between the linear conductors. A film is formed by introducing an ingredient gas into the chamber.
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Takagi, T., et. al. Oyo Buturi (or Ohyo Butsuri), Jul. 2002, p. 874-877 (Original in Japanese).
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Ito Norikazu
Takagi Tomoko
Ueda Masashi
Ishikawajima-Harima Heavy Industries Co. Ltd.
Meeks Timothy
Miller, Jr. Joseph
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
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