Method for forming semiconductor device

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

Reexamination Certificate

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Details

C257S267000, C257S471000, C257SE21410

Reexamination Certificate

active

07851310

ABSTRACT:
A method for forming semiconductor device, which simultaneously forms a trench MOS transistor device, and an embedded schottky barrier diode (SBD) device in a semiconductor substrate. The embedded SBD device has lower forward voltage drop, which reduces power dissipation. In addition, the voltage bearing ability may be modified easily by virtue of altering the dopant concentration or the width of the voltage bearing dopant region, or the thickness of epitaxial silicon layer. Furthermore, extra cost of purchasing SBD diode may be saved.

REFERENCES:
patent: 2010/0176448 (2010-07-01), Hsieh
patent: 2010/0237414 (2010-09-01), Hsieh

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