Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate
2009-06-11
2010-12-14
Smith, Matthew S (Department: 2823)
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
Having insulated gate
C257S267000, C257S471000, C257SE21410
Reexamination Certificate
active
07851310
ABSTRACT:
A method for forming semiconductor device, which simultaneously forms a trench MOS transistor device, and an embedded schottky barrier diode (SBD) device in a semiconductor substrate. The embedded SBD device has lower forward voltage drop, which reduces power dissipation. In addition, the voltage bearing ability may be modified easily by virtue of altering the dopant concentration or the width of the voltage bearing dopant region, or the thickness of epitaxial silicon layer. Furthermore, extra cost of purchasing SBD diode may be saved.
REFERENCES:
patent: 2010/0176448 (2010-07-01), Hsieh
patent: 2010/0237414 (2010-09-01), Hsieh
Lin Li-Cheng
Lin Wei-Chieh
Anpec Electronics Corporation
Enad Christine
Hsu Winston
Margo Scott
Smith Matthew S
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