Method for forming programmable logic arrays using vertical...

Electronic digital logic circuitry – Function of and – or – nand – nor – or not – Decoding

Reexamination Certificate

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C326S038000, C326S040000, C326S041000, C326S047000, C326S102000, C257S302000, C257S314000, C257S315000

Reexamination Certificate

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10929831

ABSTRACT:
One aspect disclosed herein relates to a method for forming a programmable logic array. Various embodiments of the method include forming a first logic plane and a second logic plane, each including a plurality of logic cells interconnected to implement a logical function. Forming the logic cells includes forming a horizontal substrate with a source region, a drain region, and a depletion mode channel region separating the source and the drain regions, and further includes forming a number of vertical gates located above different portions of the depletion mode channel region. At least one vertical gate is separated from the depletion mode channel region by a first oxide thickness, and at least one of the vertical gates is separated from the depletion mode channel region by a second oxide thickness. Other aspects and embodiments are provided herein.

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