Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Patent
1987-12-03
1989-04-25
Dees, Jose G.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Forming nonplanar surface
430299, 430317, 430327, 430330, 1566591, G03C 500
Patent
active
048247685
ABSTRACT:
A method is disclosed for forming an alumina film on a selected region of a surface without forming the film on an adjacent region. An ink film composed of aluminum caboxylate compound is applied to the surface and heated to partially decompose the compound. A positive photoresist layer is preferably applied to the partially decomposed layer and selectively irradiated to define a mask overlying the selected region. Unwanted photoresist material is dissolved from the adjacent region using an aqueous alkaline solution. It is found that the solution concurrently dissolves the underlying partially decomposed aluminum compound, without dissolving the compound protected by the mask. Thereafter, the mask is stripped, and the underlying aluminum compound is heated and further decomposed to produce the desired alumina film.
REFERENCES:
patent: 4040083 (1977-08-01), Saiki et al.
patent: 4613404 (1986-09-01), Tabei
patent: 4634495 (1987-01-01), Gobrecht et al.
Vest, "Metallo-Organic Materials for Improved Thick Film Reliability", Final Report for Contract No. N00163-79-C-0352 for Naval Avionic Center (1980), Report Documentation page and pp. 86, 93, 118, 119 and Thermogram Nos. 46a, 46b, 46c and 47.
Vest, "Metallo-Organic Materials for Improved Thick Film Reliability", Final Report for Contract No. N00163-80-C-0449 for Naval Avionics Center (1982), Report Documentation page and pp. 28-30 and 64-66 and Appendix A2.
Laugal Ruth C. O.
Micheli Adolph L.
Dees Jos,e G.
Fekete Douglas D.
General Motors Corporation
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