Electric lamp or space discharge component or device manufacturi – Process – With assembly or disassembly
Reexamination Certificate
2007-09-27
2010-11-16
Patel, Nimeshkumar D (Department: 2879)
Electric lamp or space discharge component or device manufacturi
Process
With assembly or disassembly
C445S023000, C445S025000, C445S001000, C313S495000, C313S497000, C313S483000
Reexamination Certificate
active
07833075
ABSTRACT:
In a method for forming a metal line, a first metal layer and a second metal layer are deposited on a substrate. The first metal layer includes aluminum, and the second metal layer includes molybdenum. A photoresist pattern having a line-shape is formed on the second metal layer. The second metal layer is etched with a chlorine-containing etching gas using the photoresist pattern as a mask. The first metal layer is then etched with a mixture of a chlorine-containing gas and nitrogen gas and/or a mixture of a chlorine-containing gas and argon gas as an etching gas. Impurities such as chlorine ions are removed from the base substrate after etching the first metal layer with a fluorine-containing gas, hydrogen gas, or water vapor. A method for manufacturing a display substrate is disclosed using the method for forming a metal line to form source, drain, and gate electrodes and gate lines.
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Chin Hong-Kee
Choi Seung-Ha
Choi Shin-Il
Jeong Yu-Gwang
Kim Sang-Gab
H.C. Park & Associates PLC
Patel Nimeshkumar D
Samsung Electronics Co,. Ltd.
Walford Natalie K
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