Method for forming I-carbon film

Details Method for forming I-carbon film Method for forming I-carbon film

2005-01-04

2005-01-04

Chen, Bret (Department: 1762)

Coating processes

Direct application of electrical, magnetic, wave, or...

Plasma

C427S574000, C427S577000, C427S904000

Reexamination Certificate

active

06838126

ABSTRACT:
A film comprising an i-carbon is formed by converting a reactive gas containing a carbon compound gas into plasma by a resonance using a microwave and a magnetic field.

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