Method for forming fine patterns of conjugated polymers

Details Method for forming fine patterns of conjugated polymers Method for forming fine patterns of conjugated polymers

1987-09-21

1989-03-28

Dees, Jose G.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Forming nonplanar surface

430270, 430325, 430330, 430914, G03C 500, G03C 516

Patent

active

048163830

ABSTRACT:
A method for forming a pattern of conjugated system polymer which can be given an electrical conductivity by doping treatment which comprises forming a thin film of a polymeric sulfonium salt having a recurring unit represented by the following general formula: ##STR1## wherein R.sub.1 represents a group capable of conjugating with an adjacent vinylene group formed by elimination of sulfonium salt as a side chain, R.sub.2 and R.sub.3 each represents hydrocarbon group having 1 to 20 carbon atoms, and X.sup.- represents counter ion, on a substrate, irradiating said thin film with a prescribed pattern of light including a deep ultraviolet ray having a wavelength not longer than 300 nm and then subjecting the thin film to development.

REFERENCES:
patent: 4339526 (1982-07-01), Baise et al.
patent: 4528118 (1985-07-01), Murase et al.
Chemical Abstracts, 104(b), 44406g (Abstract of JP-A-60-165,786).

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