Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Patent
1989-11-03
1991-01-29
Hamilton, Cynthia
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Forming nonplanar surface
430270, 430330, 430322, 430315, 430324, 430914, G03C 516, G03F 7038, G03F 732
Patent
active
049886088
ABSTRACT:
Disclosed is a method for forming a fine pattern of a conjugated polymer according to which the fine pattern can be formed even by using a high pressure mercury lamp as a light source for irradiation. This method comprises irradiating a coat containing a precursor for conjugated polymers which has a recurring unit represented by the formula (1): ##STR1## wherein R.sub.1 represents ##STR2## ps in which R.sub.3 and R.sub.4 each represents a hydrogen atom or an alkyl or alkoxy group of 1-5 carbon atoms, R.sub.5 represents a hydrocarbon group of 1-5 carbon atoms and m is 1 or 2; and R.sub.2 represents a hydrogen atom or a hydrocarbon group of 1-10 carbon atoms with a light of 200-500 nm in wavelength in pattern form and then dissolving and removing the polymer of unirradiated portion. It is preferred to heat treat the resulting fine pattern. Furthermore, the resulting pattern can have electrical conductivity by doping it with an electron donating or accepting dopant.
REFERENCES:
patent: 4816383 (1989-03-01), Taguchi et al.
Doi Shuji
Tanaka Toshihiko
Hamilton Cynthia
Sumitomo Chemical Company Limited
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