Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Patent
1996-02-23
1999-07-06
Brown, Peter Toby
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
Having insulated gate
438210, 438253, 438396, H01L 218242
Patent
active
059207752
ABSTRACT:
A method for forming a storage capacitor within an integrated circuit cell. There is first formed upon a semiconductor substrate an integrated circuit cell. The integrated circuit cell has formed therein a Field Effect Transistor (FET) which has an exposed source/drain electrode. The semiconductor substrate also has formed therein at least one other integrated circuit device which has at least one exposed contact electrode. There is then formed upon the semiconductor substrate a blanket conductor layer. The blanket conductor layer is then patterned to form a first portion of the blanket conductor layer and a second portion of the blanket conductor layer separate from each other. The first portion of the blanket conductor layer forms a patterned conductor layer contacting the exposed contact electrode of the other integrated circuit device. The second portion of the blanket conductor layer simultaneously forms a storage capacitor node contacting the exposed source/drain electrode of the Field Effect Transistor (FET). A storage capacitor within the integrated circuit cell may then be completed by forming a storage capacitor dielectric layer upon the storage capacitor node and subsequently forming a storage capacitor plate layer upon the storage capacitor dielectric layer.
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Ackerman Stephen B.
Brown Peter Toby
Saile George O.
Szecsy Alek P.
Thomas Toniae M.
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