Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Patent
1995-09-29
1998-03-17
Nguyen, Tuan H.
Semiconductor device manufacturing: process
Coating of substrate containing semiconductor region or of...
Insulative material deposited upon semiconductive substrate
438788, 438698, 438422, H01L 2131
Patent
active
057286310
ABSTRACT:
An improved structure and a process for forming an interlevel dielectric layer having a low capacitance between closely spaced metallurgy lines is provided. The method begins with a substrate surface having closely spaced metallurgy lines. A silicon oxide dielectric layer having a closed void between adjacent metallurgy lines is formed using electro cyclotron resonance techniques. The voids in the silicon dioxide dielectric layer are formed by controlling the ECR process parameters to achieve a proper etch to deposition ratio. The etch to deposition ratio of the silicon oxide layer is adjusted to the particular height and spacing between the metallurgy lines. Next, a spin-on-glass layer is formed over the silicon oxide dielectric layer. Portions of the SOG layer are etched back or chemically mechanically polished. The void (air) has a lower capacitance than the ECR silicon oxide layer. Therefore, the void in the silicon oxide dielectric layer reduces the capacitance of the layer, and in particular reduces the capacitance between metallurgy lines in the same level, which increases device performance.
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Ackerman Stephen B.
Nguyen Tuan H.
Saile George O.
Stoffel William J.
Taiwan Semiconductor Manufacturing Company , Ltd.
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