Optics: measuring and testing – By configuration comparison – With photosensitive film or plate
Patent
1987-12-18
1990-03-20
Rosenberger, Richard A.
Optics: measuring and testing
By configuration comparison
With photosensitive film or plate
356128, 356357, G01B 1106
Patent
active
049096311
ABSTRACT:
Two methods for determination of thickness of a film of known material that is mounted on one face of a solid substrate of known material are disclosed, using: (1) inversion of an optical beam reflectivity equation; or (2) determination of the film thickness that minimizes the variance of the optical beam reflectivity, computed at each of a predetermined sequence of optical beam wavelengths. Four methods for determination of the (real) refractive index of a film of known thickness mounted on a face of a solid substrate of known material are disclosed, using: (1) minimization of absolute differences of computed and measured optical beam reflectivity, summed over a sequence of known film thicknesses, for assumed values of the refractive index; (2 and 3) two iterative techniques of promote convergence of an estimate of the index to a final value of the refractive index; or (4) solution of a quadratic equation whose coefficients are slowly varying functions of the solution variable.
REFERENCES:
patent: 3892490 (1975-07-01), Uetsuki et al.
patent: 4498772 (1985-02-01), Jastrzebski et al.
patent: 4645349 (1987-02-01), Tabata
patent: 4676647 (1987-06-01), Kikkawa et al.
Myers David W.
Ozarski Robert G.
Schipper John F.
Tan Raul Y.
Watts Michael P. C.
Huberfeld Harold
Rosenberger Richard A.
Schipper John F.
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