Method for fabrication of microchannel electron multipliers

Details Method for fabrication of microchannel electron multipliers Method for fabrication of microchannel electron multipliers

1995-01-11

1996-10-29

Powell, William

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

1566441, 1566511, 1566571, 1566281, 216 24, 216 33, 216 62, H01L 2100, B44C 122

Patent

active

055693555

ABSTRACT:
The present invention discloses a method for constructing a completely micromachined MCP that is activated with thin-film dynodes wherein the interchannel regions are first dry etched in the substrate, resulting in channel pillars. The etched portions of the substrate are then back filled and the channel pillars are thereafter removed to produce a micromachined perforated microchannel plate. The technique may be employed to produce an active element for an integrated image tube or photomultiplier tube.

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