4. Etching a substrate: processes
  5. Etching of semiconductor material to produce an article...

Steven M. Shank

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Apparatus and method for forming an oxynitride insulating...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Apparatus and method for forming an oxynitride insulating...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
Reexamination Certificate

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Apparatus and method for forming an oxynitride insulating...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
Reexamination Certificate

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Bilayer ultra-thin gate dielectric and process for...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Chemical mechanical polishing method

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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