Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate
2007-10-14
2010-02-16
Smith, Matthew (Department: 2823)
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
Having insulated gate
C257SE21409
Reexamination Certificate
active
07662691
ABSTRACT:
A semiconductor device comprises an active region including a first active area to be a source/drain and a second active area to be a gate, and a device isolation region defining the active region. The first active area is obtained by growing a semiconductor substrate located between the gates as a seed layer, and formed to have a larger line-width than that of the second active area in a longitudinal direction of the gate.
REFERENCES:
patent: 7166514 (2007-01-01), Kang et al.
patent: 2006/0131657 (2006-06-01), Hamaguchi
patent: 2006/0220131 (2006-10-01), Kinoshita et al.
patent: 2007/0212874 (2007-09-01), Sandhu
Fan Michele
Hynix / Semiconductor Inc.
Smith Matthew
Townsend and Townsend / and Crew LLP
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