Method for fabricating semiconductor device with epitaxial...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

Reexamination Certificate

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C257SE21409

Reexamination Certificate

active

07662691

ABSTRACT:
A semiconductor device comprises an active region including a first active area to be a source/drain and a second active area to be a gate, and a device isolation region defining the active region. The first active area is obtained by growing a semiconductor substrate located between the gates as a seed layer, and formed to have a larger line-width than that of the second active area in a longitudinal direction of the gate.

REFERENCES:
patent: 7166514 (2007-01-01), Kang et al.
patent: 2006/0131657 (2006-06-01), Hamaguchi
patent: 2006/0220131 (2006-10-01), Kinoshita et al.
patent: 2007/0212874 (2007-09-01), Sandhu

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