Method for fabricating plasma reactor parts

Details Method for fabricating plasma reactor parts Method for fabricating plasma reactor parts

2011-04-05

2011-04-05

Paschall, Mark H (Department: 3742)

Electric heating

Metal heating

By arc

C219S497000, C219S121480, C118S725000

Reexamination Certificate

active

07919722

ABSTRACT:
A method of fabricating yttria parts is provided herein. In one embodiment, the method includes sintering a yttria sample, machining the sintered sample to form a part, and annealing the part by heating the part at a predetermined heating rate, maintaining the part at a constant annealing temperature, and cooling the part at a predetermined cooling rate. At least one of the sintering and annealing atmospheres is an oxygen-containing atmosphere.

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