4. Electric heating
  5. Metal heating
  6. By arc

Jennifer Sun

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Method for fabricating plasma reactor parts

Electric heating – Metal heating – By arc
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Method of fabricating plasma reactor parts

Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from solid or gel state
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System level in-situ integrated dielectric etch process...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Profile ID: LFUS-PAI-P-2239491

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