Method for fabricating flash memory device

Details Method for fabricating flash memory device Method for fabricating flash memory device

2011-07-12

2011-07-12

Picardat, Kevin M (Department: 2822)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C438S257000, C438S258000, C438S259000, C438S261000, C438S265000, C438S266000

Reexamination Certificate

active

07977191

ABSTRACT:
A method of forming a flash memory device includes forming a plurality of memory gates over a semiconductor substrate, forming an oxide film over the uppermost surface and sidewalls of the memory gates and then forming a plurality of selective gates on sidewalls of each of the memory gates.

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