Method for fabricating a tuning fork gyroscope

Details Method for fabricating a tuning fork gyroscope Method for fabricating a tuning fork gyroscope

2007-02-06

2007-02-06

Pert, Evan (Department: 2826)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Physical stress responsive

C438S051000

Reexamination Certificate

active

10970067

ABSTRACT:
A method for reducing errors in a tuning fork gyroscope includes determining a first distance, gt, between an upper sense plate and a proof mass and a second distance, gb, between a lower sense plate and the proof mass. The method further includes applying a first voltage, Vt, to the upper sense plate and a second voltage, Vb, to the lower sense plate, wherein the ratio of the first voltage and the second voltage is a function of the first distance and the second distance.

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