Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Patent
1996-12-23
2000-02-08
Bowers, Charles
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
Having insulated gate
438424, 257301, 257305, 257397, 257623, H01L 2108, H01L 2976, H01L 2900
Patent
active
060227818
ABSTRACT:
A semiconductor structure comprising a transistor having a gate conductor that has first and second edges bounded by raised isolation structures (e.g. STI). A source diffusion is self-aligned to the third edge and a drain diffusion is self-aligned to the fourth edge of the gate electrode.
REFERENCES:
patent: 3936859 (1976-02-01), Dingwall
patent: 4688069 (1987-08-01), Joy et al.
patent: 5173439 (1992-12-01), Dash et al.
patent: 5177028 (1993-01-01), Manning
patent: 5264716 (1993-11-01), Kenney
patent: 5298450 (1994-03-01), Verret
patent: 5369049 (1994-11-01), Acocella et al.
patent: 5448090 (1995-09-01), Geissler et al.
patent: 5539229 (1996-07-01), Noble et al.
S Wolf Silicon Processing for the VSLI ERA vol. II Lattice Press pp. 143-145 and 436-437, 1990.
T. Furukawa et al., "Process and Device Simulation of Trench Isolation Corner Parasitic Device", Proceedings of the Electrochemical Society Meeting, Oct. 9-14, 1988.
A. Bryant et al., "The Current-Carrying Corner Inherent to Trench Isolation", IEEE Electron Device Letters, Vol. 14, No. 8, Aug. 1993.
T. Ishjima et al., "A Deep-Submicron Isolation Technology with T-shaped Oxide (TSO) Structure", Proceedings of the IEDM, 1990, p. 257.
D. Foty et al., "Behavior of an NMOS Trench-Isolated Corner Parasitic Device at Low Temperature", Proceedings of the Eletrochemical Society Meeting, Oct. 1989.
El-Kareh Badih
Ghatalia Ashwin K.
Noble, Jr. Wendell P.
Blum David S.
Bowers Charles
International Business Machines - Corporation
Leas James M.
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