Method for estimation of probe shape in charged particle...

Details Method for estimation of probe shape in charged particle... Method for estimation of probe shape in charged particle...

2011-03-29

2011-03-29

Kim, Robert (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S306000, C250S307000

Reexamination Certificate

active

07915582

ABSTRACT:
A method for estimation of a probe shape, in a scanning electron microscope provided with an aberration corrector, and the method is designed so as to obtain a probe image, by inputting to a computer an image taken in a just-focused state and an image taken in a de-focused state, as an image data; preparing a correlation window by automatically determining a size of a correlation window image, based on an input data size and an output data size; executing cross-correlation calculation between the correlation window and a reference area; and repeating this calculation while shifting the reference area, so as to obtain a cross-correlation matrix, in order to stably obtain the probe image, without receiving effects of use conditions or noises.

REFERENCES:
patent: 6670611 (2003-12-01), Kruit et al.
patent: 6858844 (2005-02-01), Zach
patent: 7060986 (2006-06-01), Nakamura
patent: 7095031 (2006-08-01), Uno
patent: 2004/0174588 (2004-09-01), Iwaki et al.
patent: 2005/0189496 (2005-09-01), Uno
patent: 2005/0247860 (2005-11-01), Shishido et al.

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