4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Electron probe type

Kotoko Hirose

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Aberration corrector and charged particle beam apparatus...

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Method for estimation of probe shape in charged particle...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2253933

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