Method for electrostatic discharge protection through electric f

Details Method for electrostatic discharge protection through electric f Method for electrostatic discharge protection through electric f

1997-10-23

1999-08-03

Chaudhari, Chandra

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

438586, 438683, H01L 218238

Patent

active

059337184

ABSTRACT:
An ESD protective device is formed having a repeatable gap dimension for reliable protection by the formation of a discharge, using the materials of the gate stack for economy and a sacrificial dielectric formed between the plug and the other terminal for repeatable definition of a discharge gap.

REFERENCES:
patent: 3676742 (1972-07-01), Russell et al.
patent: 4794437 (1988-12-01), Palumbo
patent: 4891730 (1990-01-01), Saddow et al.
patent: 5357397 (1994-10-01), Leary
patent: 5468667 (1995-11-01), Diaz et al.
patent: 5516717 (1996-05-01), Hsu
patent: 5532178 (1996-07-01), Liaw et al.
patent: 5683918 (1997-11-01), Smith et al.

Affiliated with

Also associated with

Rating

Method for electrostatic discharge protection through electric f does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for electrostatic discharge protection through electric f, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for electrostatic discharge protection through electric f will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-859561