Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate
2008-07-29
2008-07-29
Lebentritt, Michael S (Department: 2829)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
C438S618000, C438S686000, C438S724000, C438S952000, C257SE21081, C257SE21261, C257SE21577, C257SE21579
Reexamination Certificate
active
07405153
ABSTRACT:
A process for the formation of an interconnect in a semiconductor structure including the steps of forming a dielectric layer on a substrate, forming a first barrier layer on the dielectric layer, forming a second barrier layer on the first barrier layer, wherein the second barrier layer is selected from the group consisting of ruthenium, platinum, palladium, rhodium and iridium and wherein the formation of the second barrier layer is manipulated so that the bulk concentration of oxygen in the second barrier layer is 20 atomic percent or less, and forming a conductive layer on the second barrier layer. The process may additionally include a step of treating the second barrier to reduce the amount of oxide on the surface of the second barrier layer.
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Deligianni Hariklia
Malhotra Sandra G.
Rossnagel Stephen M.
Shao Xiaoyan
Tai Tsong-Lin
International Business Machines - Corporation
Jaklitsch Lisa U.
Lebentritt Michael S
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