Method for depositing barium strontium titanate

Details Method for depositing barium strontium titanate Method for depositing barium strontium titanate

1998-03-31

2000-06-20

Tentoni, Leo B.

Coating processes

Coating by vapor, gas, or smoke

Mixture of vapors or gases utilized

117 86, 117 88, 117949, 42725531, C23C 1600

Patent

active

060775629

ABSTRACT:
The invention relates to an apparatus and process for the vaporization of liquid precursors and deposition of a film on a suitable substrate. Particularly contemplated is an apparatus and process for the deposition of a metal-oxide film, such as a barium, strontium, titanium oxide (BST) film, on a silicon wafer to make integrated circuit capacitors useful in high capacity dynamic memory modules.

REFERENCES:
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patent: 5204314 (1993-04-01), Kirlin et al.
patent: 5527567 (1996-06-01), Desu et al.
patent: 5681613 (1997-10-01), Hansen
U.S. application 09/052,763 filed Mar. 31, 1998.
U.S. application 09/052,765 filed Mar. 31, 1998.
U.S. application 09/052,767 filed Mar. 31, 1998.
U.S. application 09/052,792 filed Mar. 31, 1998.
U.S. application 09/052,885 filed Mar. 31, 1998.
PCT Search Report dated Jan. 27, 1999.
U.S. application 09/052,743 filed Mar. 31, 1998.
U.S. application 09/052,747 filed Mar. 31, 1998.
U.S. application 08/749,613 filed Nov. 18, 1996.
U.S. application 08/927,700 filed Sep. 11, 1997.

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