Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent
1992-12-15
1994-07-19
McFarlane, Anthony
Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
20419215, 20419225, 4272551, 4272552, 437165, C23C 408
Patent
active
053306295
ABSTRACT:
A manufacturing method which includes forming a metallic, aluminum-containing layer adherent to a surface of a body. The method includes the steps of depositing aluminum on the surface from an aluminum-containing vapor, and during the aluminum-depositing step, the further step of depositing arsenic, phosphorus, or antimony on the surface from the vapor.
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Cunningham John E.
Jan William Y.
Rentschler John A.
Warwick Colin A.
AT&T Bell Laboratories
Finston Martin I.
McFarlane Anthony
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