Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Patent
1995-05-01
1998-11-10
Bowers, Jr., Charles L.
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
438686, H01L 2144
Patent
active
058343741
ABSTRACT:
A method for forming thin films and controlling the tensile and compressive stresses and mechanical properties of the thin film. The method includes forming an alloy on a substrate having a solvent metal and a solute, then annealing the substrate and the alloy in one of an oxidizing, nitriding and carborizing ambient so that the ambient reacts with the solute to form respectively one of an oxide, nitride and carbide precipitates of the solute in the solvent. The solute is selected so that the precipitates formed may be used to control the mechanical properties of the solvent.
REFERENCES:
patent: 3026200 (1962-03-01), Gregory et al.
patent: 3399086 (1968-08-01), Das et al.
patent: 3779714 (1973-12-01), Nadkarni et al.
patent: 3922180 (1975-11-01), Fuchs et al.
patent: 4077830 (1978-03-01), Fulwiler
patent: 4315777 (1982-02-01), Nadkarni et al.
patent: 4322754 (1982-03-01), Mason
patent: 4383284 (1983-05-01), Isshiki
patent: 4772452 (1988-09-01), Brupbacher et al.
patent: 4887146 (1989-12-01), Hinode
patent: 4915908 (1990-04-01), Nagle et al.
patent: 5063120 (1991-11-01), Edmonson et al.
patent: 5190807 (1993-03-01), Kimock et al.
patent: 5253122 (1993-10-01), Chiba et al.
patent: 5279026 (1994-01-01), Uhde
patent: 5285109 (1994-02-01), Tomikawa et al.
patent: 5308794 (1994-05-01), Tu
patent: 5336547 (1994-08-01), Kawakita et al.
"Preparation of High-Strength Materials by Controlling the Dispersion of a Second Phase" by S.R. Mader et al.; IBM Technical Disclosure Bulletin; vol. 9, No. 12, May 1967; pp. 1788-1789.
"The Emerging Role of Flexible Media" by Patel and Richards; IEEE, vol. 81, No. 4, pp. 595-606 (abstract only).
"The Promise of CD-ROM is Now Being Realized" by Dayton; Office, Sep. 1989, vol. 110, pp. 50, 56 (abstract only).
"On Data Security of Magnetic Data Media", Output, pp. 33-37, Feb. 1986 (abstract only).
Cabral, Jr. Cyril
Clevenger Lawrence Alfred
d'Heurle Fran.cedilla.ois Max
Hong Qi-Zhong
Berry Renee R.
Bowers Jr. Charles L.
International Business Machines - Corporation
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