Electricity: electrical systems and devices – Electrostatic capacitors – Fixed capacitor
Reexamination Certificate
2006-08-15
2006-08-15
Ha, Nguyen T. (Department: 2831)
Electricity: electrical systems and devices
Electrostatic capacitors
Fixed capacitor
C361S302000, C361S303000, C361S313000, C361S321100, C361S321200
Reexamination Certificate
active
07092235
ABSTRACT:
A method and apparatus, is herein disclosed, for adjusting capacitance of an on-chip capacitor formed on a substrate. A plurality of conductive layers is separated by a layer ofdielectric material. The dielectric material of the capacitor is exposed to an ion beam. The ion beam includes ions of at least one material to modify a dielectric constant of the dielectric material.
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patent: 5563762 (1996-10-01), Leung et al.
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patent: 6451662 (2002-09-01), Chudzik et al.
patent: 6700771 (2004-03-01), Bhattacharyya
Clevenger Lawrence A.
Dalton Timothy J.
Hon Wong Keith Kwong
Hsu Louis L.
Radens Carl
Cheung, Esq. Wan Yee
Ha Nguyen T.
Patterson & Sheridan L.L.P.
Tong, Esq. Kin-Wah
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