Glass manufacturing – Processes – With chemically reactive treatment of glass preform
Patent
1985-10-31
1988-02-09
Schor, Kenneth
Glass manufacturing
Processes
With chemically reactive treatment of glass preform
65 33, 65901, 65 181, 156643, 156663, C03C 1700, C03C 1000, B44C 122
Patent
active
047239786
ABSTRACT:
By hydrolyzing an organoalkoysilane monomer at high concentration in solution to form a silanol, allowing the silanol to age to produce a low molecular weight oligomer, spin-applying the oligomer onto a substrate to form a discrete film of highly associated cyclic oligomer thereon, heat treating the oligomer film to form a modified ladder-type silsesquioxane condensation polymer, and then oxidizing the silsesquioxane in an O.sub.2 RIE, an organoglass is formed which presents novel etch properties. The organoglass can be used as an etch-stop layer in a passivation process.
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Clodgo Donna J.
Previti-Kelly Rosemary A.
Walton Erick G.
Boyer Michael K.
Chadurjian M. F.
International Business Machines - Corporation
Klitzman M. H.
LaBaw Jeffrey S.
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