Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2009-07-08
2011-12-20
Decady, Albert (Department: 2121)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S099000, C700S110000, C700S121000
Reexamination Certificate
active
08082055
ABSTRACT:
A method for providing a bin ratio forecast at an early stage of integrated circuit device manufacturing processes is disclosed. The method comprises collecting historical data from one or more processed wafer lots; collect measurement data from one or more skew wafer lots; generating an estimated baseline distribution from the collected historical data and collected measurement data; generating an estimated performance distribution based on one or more specified parameters and the generated estimated baseline distribution; determining a bin ratio forecast by applying a bin definition and a yield degradation factor estimation to the generated estimated performance distribution; determining one or more production targets based on the bin ratio forecast; and processing one or more wafers based on the one or more determined production targets.
REFERENCES:
patent: 6610550 (2003-08-01), Pasadyn et al.
patent: 6901564 (2005-05-01), Stine et al.
patent: 7580924 (2009-08-01), Ling et al.
patent: 2006/0241802 (2006-10-01), Chen et al.
patent: 2010/0268367 (2010-10-01), Wu et al.
Chen Jui-Long
Huang Chia-Hung
Lin Chun-Hsien
Mou Jong-I
Tsen Andy
De'cady Albert
Garland Steven
Haynes and Boone LLP
Taiwan Semiconductor Manufacturing Company , Ltd.
LandOfFree
Method for a bin ratio forecast at new tape out stage does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method for a bin ratio forecast at new tape out stage, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for a bin ratio forecast at new tape out stage will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4262499