Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Reexamination Certificate
2006-07-06
2008-05-06
Wells, Nikita (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Analyte supports
C250S307000, C250S309000, C250S492210
Reexamination Certificate
active
07368729
ABSTRACT:
A method and system for separating and preparing a sample for analysis from a wafer without contaminating the wafer with an element such as Ga. A first ion beam is irradiated on a sample and scanned to fabricate a micro sample from a part of the sample. A probe for separating the micro sample from the sample and a micro-sample stage on which the micro sample is to be placed and held are provided. The first ion beam contains at least one of an inert gas, oxygen and nitrogen as an element. A second ion beam contains an element different from the element of the first ion beam. The separated micro sample is fed to the second ion beam from the apparatus of the first ion beam while being held on the micro-sample stage, and is processed by using the second ion beam.
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Fukuda Muneyuki
Shichi Hiroyasu
Umemura Kaoru
Hitachi High-Technologies Corp.
Mattingly, Stanger Malur & Brundidge PC
Smith II Johnnie L
Wells Nikita
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