4. Semiconductor device manufacturing: process
  5. Including control responsive to sensed condition
  6. Optical characteristic sensed

Hongyu Yue

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Controlling a material processing tool and performance data

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
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Determining endpoint in etching processes using principal...

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
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Determining endpoint in etching processes using principal...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Determining endpoint in etching processes using real-time...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
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Method and apparatus for detecting endpoint

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
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Profile ID: LFUS-PAI-P-2115798

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