Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate
2011-03-08
2011-03-08
Smith, Matthew S (Department: 2823)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
C438S686000, C257SE21497, C257SE21333
Reexamination Certificate
active
07902070
ABSTRACT:
A method and system for producing a noble metal film includes the step of sputtering a noble metal on a substrate thus obtaining a film. The method and system further includes the step of subjecting the film to a thermal treatment, thus obtaining the noble metal film.
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Conoci Sabrina
Petralia Salvatore
Graybeal Jackson LLP
Jefferson Quovaunda
Jorgenson Lisa K.
Rusyn Paul F.
Smith Matthew S
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