Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2006-04-10
2008-11-11
Choi, William C (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S223100
Reexamination Certificate
active
07450296
ABSTRACT:
Disclosed is a method and a system for forming alignment marks on a transparent substrate. A light reflective layer is deposited over an optically transparent substrate of a wafer. A region is defined around an alignment mark on the optically transparent substrate. The light reflective layer is removed from a substantial portion of the transparent substrate excluding the region. In addition, a micro electro-mechanical systems device is disclosed. The device comprises an optically transparent substrate, at least one optically partially transparent alignment mark on the optically transparent substrate, and a plurality of reflective elements or imaging pixels attached to the optically transparent substrate.
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patent: 6529310 (2003-03-01), Huibers et al.
patent: 6947196 (2005-09-01), Chen et al.
patent: 2004/0012838 (2004-01-01), Huibers
Gau Tsai-Sheng
Jang Ruei-Hung
Lee Ya-Wen
Lin Chin-Hsiang
Pan Sheng-Liang
Choi William C
Haynes & Boone LLP
Taiwan Semiconductor Manufacturing Company , Ltd.
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