Method and system for inspecting electronic circuit pattern

Details Method and system for inspecting electronic circuit pattern Method and system for inspecting electronic circuit pattern

2007-06-12

2007-06-12

Bali, Vikkram (Department: 2624)

Image analysis

Applications

Manufacturing or product inspection

Reexamination Certificate

active

10050519

ABSTRACT:
For the purpose of reducing a false report and shortening inspection time, an area to be inspected is locally inspected under optimum inspection conditions. In order to avoid the number of detected defects from increasing explosively, and thereby to facilitate control of a critical defect, general-purpose layout data, which is used for producing a mask of a semiconductor wafer, is accumulated in a design information server2. With reference to the layout data, an area to be inspected, which is inspected by a pattern inspecting apparatus1, is divided into partial inspection areas including a cell portion and a non-cell portion. Inspection parameters are set for each of the partial inspection areas. In addition, the defect reviewing apparatus8obtains an inspection result of the pattern inspecting apparatus1. When obtaining a defect image, the defect reviewing apparatus8identifies a position, where the defect occurred, from among a cell portion, a non-cell portion, a pattern dense portion, and the like according to layout data. Moreover, the defect reviewing apparatus8sets inspection parameters, such as pickup magnification of this defect, in response to a result of the identification to set a control criterion of criticality.

REFERENCES:
patent: 6466895 (2002-10-01), Harvey et al.
patent: 6483937 (2002-11-01), Samuels
patent: 62-43505 (1987-02-01), None
patent: 10-135228 (1998-05-01), None

Affiliated with

Also associated with

Rating

Method and system for inspecting electronic circuit pattern does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and system for inspecting electronic circuit pattern, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and system for inspecting electronic circuit pattern will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3863569