Method and system for improved optical imaging in microlithograp

Details Method and system for improved optical imaging in microlithograp Method and system for improved optical imaging in microlithograp

1999-03-30

2000-11-21

Mathews, Alan A.

Photocopying

Projection printing and copying cameras

Illumination systems or details

355 53, 359562, 359564, 430 3, G03B 2742, G03B 2772, G02B 2742

Patent

active

06151103&

ABSTRACT:
An improved microlithographic imaging system (100) is disclosed. The system comprises a filter (183) substantially aligned with a first image plane, adjacent to an aperture (185). The filter is formed in response to an image projected by a light source (110) through a reticle (160) onto the first image plane. The improved microlithographic imaging system has higher resolution and depth of focus than prior art imaging systems, due to the additional filtering performed by the filter (183). A filter in accordance with the invention can be fabricated easily and inexpensively, using conventional microlithography techniques. A filter in accordance with the invention can also be used to detect or correct flaws in the reticle (160).

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patent: 5642183 (1997-06-01), Sugihara et al.
patent: 5677757 (1997-10-01), Taniguchi et al.

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