Method and system for focusing a charged particle beam

Details Method and system for focusing a charged particle beam Method and system for focusing a charged particle beam

2005-06-17

2008-05-20

Berman, Jack I. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S306000, C250S307000, C250S311000

Reexamination Certificate

active

07375326

ABSTRACT:
A method for focusing a charged particle beam, the method including: (a) altering a focal point of a charged particle beam according to a first focal pattern while scanning a first area of a sample and collecting a first set of detection signals; (b) altering a focal point of a charged particle beam according to a second focal pattern while scanning a second area that is ideally identical to the first area and collecting a second set of detection signals; and (c) processing the first and second set of detection signals to determine a focal characteristic; wherein the first focal pattern and the second focal pattern differ by the location of an optimal focal point.

REFERENCES:
patent: 6337488 (2002-01-01), Okawauchi
patent: 6538249 (2003-03-01), Takane et al.
patent: 6541747 (2003-04-01), Kikuchi et al.
patent: 2001/0007498 (2001-07-01), Arai et al.
patent: 2003/0178576 (2003-09-01), Pan et al.
patent: 2004/0146295 (2004-07-01), Furman et al.
patent: 01117129 (2001-07-01), None
patent: WO-2004063698 (2004-07-01), None

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