Method and system for characterizing porous materials

Details Method and system for characterizing porous materials Method and system for characterizing porous materials

2007-03-22

2010-10-05

Meeks, Timothy H (Department: 1715)

Coating processes

Measuring, testing, or indicating

C374S004000, C095S045000, C095S051000

Reexamination Certificate

active

07807213

ABSTRACT:
A method and system for diagnosing the effectiveness of a treatment on a porous material. For example, the porous material can include a porous low dielectric constant material. In particular, the method can utilize FTIR spectroscopy to characterize the porosity of materials, and assess the effectiveness of sealing pores in the material.

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